2/19/2013	12:03:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2013	12:03:45 PM	Recipe started at 12:03 PM
2/19/2013	12:03:45 PM	Helium valve closed
2/19/2013	12:03:45 PM	H2 valve closed
2/19/2013	12:03:45 PM	BCl3 valve closed
2/19/2013	12:03:45 PM	PH3 valve closed
2/19/2013	12:03:45 PM	SiCl4 pre valve closed
2/19/2013	12:03:45 PM	SiCl4 post valve closed
2/19/2013	12:03:45 PM	Main Vac valve closed
2/19/2013	12:03:45 PM	Bypass valve closed
2/19/2013	12:03:45 PM	Bubbler valve closed
2/19/2013	12:03:45 PM	Helium MFC set to  0.000000
2/19/2013	12:03:45 PM	H2 MFC set to  0.000000
2/19/2013	12:03:45 PM	BCl3 MFC set to  0.000000
2/19/2013	12:03:45 PM	PH3 MFC set to  0.000000
2/19/2013	12:03:45 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:03:45 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:03:46 PM	Tube furnace set to 0
2/19/2013	12:03:49 PM	H2 valve closed
2/19/2013	12:03:49 PM	BCl3 valve closed
2/19/2013	12:03:49 PM	PH3 valve closed
2/19/2013	12:03:49 PM	SiCl4 pre valve closed
2/19/2013	12:03:49 PM	SiCl4 post valve closed
2/19/2013	12:03:49 PM	Main Vac valve closed
2/19/2013	12:03:49 PM	Bypass valve closed
2/19/2013	12:03:49 PM	Bubbler valve closed
2/19/2013	12:03:49 PM	Helium valve opened
2/19/2013	12:03:49 PM	Helium MFC set to  500.000000
2/19/2013	12:03:49 PM	H2 MFC set to  0.000000
2/19/2013	12:03:49 PM	BCl3 MFC set to  0.000000
2/19/2013	12:03:49 PM	PH3 MFC set to  0.000000
2/19/2013	12:03:49 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:03:49 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:03:49 PM	Tube furnace set to 0
2/19/2013	12:05:02 PM	Helium valve closed
2/19/2013	12:05:02 PM	H2 valve closed
2/19/2013	12:05:02 PM	BCl3 valve closed
2/19/2013	12:05:02 PM	PH3 valve closed
2/19/2013	12:05:02 PM	SiCl4 pre valve closed
2/19/2013	12:05:02 PM	SiCl4 post valve closed
2/19/2013	12:05:02 PM	Main Vac valve closed
2/19/2013	12:05:02 PM	Bypass valve closed
2/19/2013	12:05:02 PM	Bubbler valve closed
2/19/2013	12:05:02 PM	Helium MFC set to  0.000000
2/19/2013	12:05:02 PM	H2 MFC set to  0.000000
2/19/2013	12:05:02 PM	BCl3 MFC set to  0.000000
2/19/2013	12:05:02 PM	PH3 MFC set to  0.000000
2/19/2013	12:05:02 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:05:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:05:02 PM	Tube furnace set to 0
2/19/2013	12:05:03 PM	Run finished at 12:05 PM
2/19/2013	12:05:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2013	12:10:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2013	12:10:35 PM	Recipe started at 12:10 PM
2/19/2013	12:10:36 PM	Helium valve closed
2/19/2013	12:10:36 PM	H2 valve closed
2/19/2013	12:10:36 PM	BCl3 valve closed
2/19/2013	12:10:36 PM	PH3 valve closed
2/19/2013	12:10:36 PM	SiCl4 pre valve closed
2/19/2013	12:10:36 PM	SiCl4 post valve closed
2/19/2013	12:10:36 PM	Main Vac valve closed
2/19/2013	12:10:36 PM	Bubbler valve closed
2/19/2013	12:10:36 PM	Bypass valve opened
2/19/2013	12:10:36 PM	Helium MFC set to  0.000000
2/19/2013	12:10:36 PM	H2 MFC set to  0.000000
2/19/2013	12:10:36 PM	BCl3 MFC set to  0.000000
2/19/2013	12:10:36 PM	PH3 MFC set to  0.000000
2/19/2013	12:10:36 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:10:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:10:36 PM	Tube furnace set to 0
2/19/2013	12:11:49 PM	Helium valve closed
2/19/2013	12:11:49 PM	H2 valve closed
2/19/2013	12:11:49 PM	BCl3 valve closed
2/19/2013	12:11:49 PM	PH3 valve closed
2/19/2013	12:11:49 PM	SiCl4 pre valve closed
2/19/2013	12:11:49 PM	SiCl4 post valve closed
2/19/2013	12:11:49 PM	Main Vac valve closed
2/19/2013	12:11:49 PM	Bubbler valve closed
2/19/2013	12:11:49 PM	Bypass valve opened
2/19/2013	12:11:49 PM	Helium MFC set to  0.000000
2/19/2013	12:11:49 PM	H2 MFC set to  0.000000
2/19/2013	12:11:49 PM	BCl3 MFC set to  0.000000
2/19/2013	12:11:49 PM	PH3 MFC set to  0.000000
2/19/2013	12:11:49 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:11:49 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:11:50 PM	Tube furnace set to 0
2/19/2013	12:12:50 PM	Helium valve closed
2/19/2013	12:12:50 PM	H2 valve closed
2/19/2013	12:12:50 PM	BCl3 valve closed
2/19/2013	12:12:50 PM	PH3 valve closed
2/19/2013	12:12:50 PM	SiCl4 pre valve closed
2/19/2013	12:12:50 PM	SiCl4 post valve closed
2/19/2013	12:12:50 PM	Bypass valve closed
2/19/2013	12:12:50 PM	Bubbler valve closed
2/19/2013	12:12:50 PM	Main Vac valve opened
2/19/2013	12:12:50 PM	Helium MFC set to  0.000000
2/19/2013	12:12:50 PM	H2 MFC set to  0.000000
2/19/2013	12:12:50 PM	BCl3 MFC set to  0.000000
2/19/2013	12:12:50 PM	PH3 MFC set to  0.000000
2/19/2013	12:12:50 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:12:50 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:12:50 PM	Tube furnace set to 0
2/19/2013	12:12:51 PM	Run finished at 12:12 PM
2/19/2013	12:12:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2013	12:14:58 PM	Main Vac valve closed
2/19/2013	12:14:59 PM	Main Vac valve opened
2/19/2013	12:15:52 PM	Main Vac valve closed
2/19/2013	12:15:53 PM	Main Vac valve opened
2/19/2013	12:20:34 PM	Main Vac valve closed
2/19/2013	12:21:08 PM	Main Vac valve opened
2/19/2013	12:22:17 PM	Helium MFC set to  10.000000
2/19/2013	12:22:19 PM	Helium valve opened
2/19/2013	12:22:40 PM	Helium valve closed
2/19/2013	12:23:37 PM	Helium valve opened
2/19/2013	12:24:08 PM	Helium valve closed
2/19/2013	12:28:28 PM	Recipe started at 12:28 PM
2/19/2013	12:28:28 PM	Helium valve closed
2/19/2013	12:28:28 PM	H2 valve closed
2/19/2013	12:28:28 PM	BCl3 valve closed
2/19/2013	12:28:28 PM	PH3 valve closed
2/19/2013	12:28:28 PM	SiCl4 pre valve closed
2/19/2013	12:28:28 PM	SiCl4 post valve closed
2/19/2013	12:28:28 PM	Bypass valve closed
2/19/2013	12:28:28 PM	Bubbler valve closed
2/19/2013	12:28:28 PM	Main Vac valve opened
2/19/2013	12:28:28 PM	Helium MFC set to  0.000000
2/19/2013	12:28:28 PM	H2 MFC set to  0.000000
2/19/2013	12:28:28 PM	BCl3 MFC set to  0.000000
2/19/2013	12:28:28 PM	PH3 MFC set to  0.000000
2/19/2013	12:28:28 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:28:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:28:28 PM	Tube furnace set to 0
2/19/2013	12:58:29 PM	Helium valve closed
2/19/2013	12:58:29 PM	H2 valve closed
2/19/2013	12:58:29 PM	BCl3 valve closed
2/19/2013	12:58:29 PM	PH3 valve closed
2/19/2013	12:58:29 PM	SiCl4 pre valve closed
2/19/2013	12:58:29 PM	SiCl4 post valve closed
2/19/2013	12:58:29 PM	Main Vac valve closed
2/19/2013	12:58:29 PM	Bypass valve closed
2/19/2013	12:58:29 PM	Bubbler valve closed
2/19/2013	12:58:29 PM	Helium MFC set to  0.000000
2/19/2013	12:58:29 PM	H2 MFC set to  0.000000
2/19/2013	12:58:29 PM	BCl3 MFC set to  0.000000
2/19/2013	12:58:29 PM	PH3 MFC set to  0.000000
2/19/2013	12:58:29 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:58:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:58:29 PM	Tube furnace set to 0
2/19/2013	12:58:32 PM	Helium valve closed
2/19/2013	12:58:32 PM	BCl3 valve closed
2/19/2013	12:58:32 PM	PH3 valve closed
2/19/2013	12:58:32 PM	SiCl4 pre valve closed
2/19/2013	12:58:32 PM	SiCl4 post valve closed
2/19/2013	12:58:32 PM	Main Vac valve closed
2/19/2013	12:58:32 PM	Bypass valve closed
2/19/2013	12:58:32 PM	Bubbler valve closed
2/19/2013	12:58:32 PM	H2 valve opened
2/19/2013	12:58:32 PM	Helium MFC set to  0.000000
2/19/2013	12:58:32 PM	H2 MFC set to  500.000000
2/19/2013	12:58:32 PM	BCl3 MFC set to  0.000000
2/19/2013	12:58:32 PM	PH3 MFC set to  0.000000
2/19/2013	12:58:32 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:58:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:58:32 PM	Tube furnace set to 0
2/19/2013	12:59:48 PM	Helium valve closed
2/19/2013	12:59:48 PM	BCl3 valve closed
2/19/2013	12:59:48 PM	PH3 valve closed
2/19/2013	12:59:48 PM	SiCl4 pre valve closed
2/19/2013	12:59:48 PM	SiCl4 post valve closed
2/19/2013	12:59:48 PM	Main Vac valve closed
2/19/2013	12:59:48 PM	Bypass valve closed
2/19/2013	12:59:48 PM	H2 valve opened
2/19/2013	12:59:48 PM	Bubbler valve opened
2/19/2013	12:59:48 PM	Helium MFC set to  0.000000
2/19/2013	12:59:48 PM	H2 MFC set to  500.000000
2/19/2013	12:59:48 PM	BCl3 MFC set to  0.000000
2/19/2013	12:59:48 PM	PH3 MFC set to  0.000000
2/19/2013	12:59:48 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:59:48 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:59:48 PM	Tube furnace set to 0
2/19/2013	12:59:49 PM	Helium valve closed
2/19/2013	12:59:49 PM	BCl3 valve closed
2/19/2013	12:59:49 PM	PH3 valve closed
2/19/2013	12:59:49 PM	SiCl4 pre valve closed
2/19/2013	12:59:49 PM	SiCl4 post valve closed
2/19/2013	12:59:49 PM	Main Vac valve closed
2/19/2013	12:59:49 PM	Bypass valve closed
2/19/2013	12:59:49 PM	H2 valve opened
2/19/2013	12:59:49 PM	Bubbler valve opened
2/19/2013	12:59:49 PM	Helium MFC set to  0.000000
2/19/2013	12:59:49 PM	H2 MFC set to  500.000000
2/19/2013	12:59:49 PM	BCl3 MFC set to  0.000000
2/19/2013	12:59:49 PM	PH3 MFC set to  0.000000
2/19/2013	12:59:49 PM	SiCl4 MFC set to  0.000000
2/19/2013	12:59:49 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	12:59:49 PM	Tube furnace set to 1000
2/19/2013	1:19:49 PM	Helium valve closed
2/19/2013	1:19:49 PM	PH3 valve closed
2/19/2013	1:19:49 PM	SiCl4 pre valve closed
2/19/2013	1:19:49 PM	SiCl4 post valve closed
2/19/2013	1:19:49 PM	Main Vac valve closed
2/19/2013	1:19:49 PM	Bypass valve closed
2/19/2013	1:19:49 PM	H2 valve opened
2/19/2013	1:19:49 PM	BCl3 valve opened
2/19/2013	1:19:49 PM	Bubbler valve opened
2/19/2013	1:19:49 PM	Helium MFC set to  0.000000
2/19/2013	1:19:49 PM	H2 MFC set to  500.000000
2/19/2013	1:19:49 PM	BCl3 MFC set to  20.000000
2/19/2013	1:19:49 PM	PH3 MFC set to  0.000000
2/19/2013	1:19:49 PM	SiCl4 MFC set to  0.000000
2/19/2013	1:19:49 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	1:19:50 PM	Tube furnace set to 1000
2/19/2013	2:19:50 PM	Helium valve closed
2/19/2013	2:19:50 PM	BCl3 valve closed
2/19/2013	2:19:50 PM	PH3 valve closed
2/19/2013	2:19:50 PM	SiCl4 pre valve closed
2/19/2013	2:19:50 PM	SiCl4 post valve closed
2/19/2013	2:19:50 PM	Main Vac valve closed
2/19/2013	2:19:50 PM	Bypass valve closed
2/19/2013	2:19:50 PM	H2 valve opened
2/19/2013	2:19:50 PM	Bubbler valve opened
2/19/2013	2:19:50 PM	Helium MFC set to  0.000000
2/19/2013	2:19:50 PM	H2 MFC set to  500.000000
2/19/2013	2:19:50 PM	BCl3 MFC set to  0.000000
2/19/2013	2:19:50 PM	PH3 MFC set to  0.000000
2/19/2013	2:19:50 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:19:50 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:19:50 PM	Tube furnace set to 750
2/19/2013	2:24:50 PM	H2 valve closed
2/19/2013	2:24:50 PM	BCl3 valve closed
2/19/2013	2:24:50 PM	PH3 valve closed
2/19/2013	2:24:50 PM	SiCl4 pre valve closed
2/19/2013	2:24:50 PM	SiCl4 post valve closed
2/19/2013	2:24:50 PM	Main Vac valve closed
2/19/2013	2:24:50 PM	Bypass valve closed
2/19/2013	2:24:50 PM	Helium valve opened
2/19/2013	2:24:50 PM	Bubbler valve opened
2/19/2013	2:24:50 PM	Helium MFC set to  500.000000
2/19/2013	2:24:50 PM	H2 MFC set to  0.000000
2/19/2013	2:24:50 PM	BCl3 MFC set to  0.000000
2/19/2013	2:24:50 PM	PH3 MFC set to  0.000000
2/19/2013	2:24:50 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:24:50 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:24:50 PM	Tube furnace set to 0
2/19/2013	2:44:50 PM	Helium valve closed
2/19/2013	2:44:50 PM	H2 valve closed
2/19/2013	2:44:50 PM	BCl3 valve closed
2/19/2013	2:44:50 PM	PH3 valve closed
2/19/2013	2:44:50 PM	SiCl4 pre valve closed
2/19/2013	2:44:50 PM	SiCl4 post valve closed
2/19/2013	2:44:50 PM	Main Vac valve closed
2/19/2013	2:44:50 PM	Bypass valve closed
2/19/2013	2:44:50 PM	Bubbler valve closed
2/19/2013	2:44:50 PM	Helium MFC set to  0.000000
2/19/2013	2:44:50 PM	H2 MFC set to  0.000000
2/19/2013	2:44:50 PM	BCl3 MFC set to  0.000000
2/19/2013	2:44:50 PM	PH3 MFC set to  0.000000
2/19/2013	2:44:50 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:44:50 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:44:50 PM	Tube furnace set to 0
2/19/2013	2:44:51 PM	Run finished at 2:44 PM
2/19/2013	2:46:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2013	2:46:24 PM	Recipe started at 2:46 PM
2/19/2013	2:46:24 PM	Helium valve closed
2/19/2013	2:46:24 PM	H2 valve closed
2/19/2013	2:46:24 PM	BCl3 valve closed
2/19/2013	2:46:24 PM	PH3 valve closed
2/19/2013	2:46:24 PM	SiCl4 pre valve closed
2/19/2013	2:46:24 PM	SiCl4 post valve closed
2/19/2013	2:46:24 PM	Main Vac valve closed
2/19/2013	2:46:24 PM	Bypass valve closed
2/19/2013	2:46:24 PM	Bubbler valve closed
2/19/2013	2:46:24 PM	Helium MFC set to  0.000000
2/19/2013	2:46:24 PM	H2 MFC set to  0.000000
2/19/2013	2:46:24 PM	BCl3 MFC set to  0.000000
2/19/2013	2:46:24 PM	PH3 MFC set to  0.000000
2/19/2013	2:46:24 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:46:24 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:46:24 PM	Tube furnace set to 0
2/19/2013	2:46:27 PM	H2 valve closed
2/19/2013	2:46:27 PM	BCl3 valve closed
2/19/2013	2:46:27 PM	PH3 valve closed
2/19/2013	2:46:27 PM	SiCl4 pre valve closed
2/19/2013	2:46:27 PM	SiCl4 post valve closed
2/19/2013	2:46:27 PM	Main Vac valve closed
2/19/2013	2:46:27 PM	Bypass valve closed
2/19/2013	2:46:27 PM	Bubbler valve closed
2/19/2013	2:46:27 PM	Helium valve opened
2/19/2013	2:46:27 PM	Helium MFC set to  500.000000
2/19/2013	2:46:27 PM	H2 MFC set to  0.000000
2/19/2013	2:46:27 PM	BCl3 MFC set to  0.000000
2/19/2013	2:46:27 PM	PH3 MFC set to  0.000000
2/19/2013	2:46:27 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:46:27 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:46:27 PM	Tube furnace set to 0
2/19/2013	2:46:28 PM	Helium valve closed
2/19/2013	2:46:28 PM	H2 valve closed
2/19/2013	2:46:28 PM	BCl3 valve closed
2/19/2013	2:46:28 PM	PH3 valve closed
2/19/2013	2:46:28 PM	SiCl4 pre valve closed
2/19/2013	2:46:28 PM	SiCl4 post valve closed
2/19/2013	2:46:28 PM	Main Vac valve closed
2/19/2013	2:46:28 PM	Bypass valve closed
2/19/2013	2:46:28 PM	Bubbler valve closed
2/19/2013	2:46:28 PM	Helium MFC set to  0.000000
2/19/2013	2:46:28 PM	H2 MFC set to  0.000000
2/19/2013	2:46:28 PM	BCl3 MFC set to  0.000000
2/19/2013	2:46:28 PM	PH3 MFC set to  0.000000
2/19/2013	2:46:28 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:46:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:46:28 PM	Tube furnace set to 0
2/19/2013	2:46:29 PM	Run finished at 2:46 PM
2/19/2013	2:46:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2013	2:53:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2013	2:53:57 PM	Recipe started at 2:53 PM
2/19/2013	2:53:57 PM	Helium valve closed
2/19/2013	2:53:57 PM	H2 valve closed
2/19/2013	2:53:57 PM	BCl3 valve closed
2/19/2013	2:53:57 PM	PH3 valve closed
2/19/2013	2:53:57 PM	SiCl4 pre valve closed
2/19/2013	2:53:57 PM	SiCl4 post valve closed
2/19/2013	2:53:57 PM	Main Vac valve closed
2/19/2013	2:53:57 PM	Bubbler valve closed
2/19/2013	2:53:57 PM	Bypass valve opened
2/19/2013	2:53:57 PM	Helium MFC set to  0.000000
2/19/2013	2:53:57 PM	H2 MFC set to  0.000000
2/19/2013	2:53:57 PM	BCl3 MFC set to  0.000000
2/19/2013	2:53:57 PM	PH3 MFC set to  0.000000
2/19/2013	2:53:57 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:53:57 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:53:58 PM	Tube furnace set to 0
2/19/2013	2:55:11 PM	Helium valve closed
2/19/2013	2:55:11 PM	H2 valve closed
2/19/2013	2:55:11 PM	BCl3 valve closed
2/19/2013	2:55:11 PM	PH3 valve closed
2/19/2013	2:55:11 PM	SiCl4 pre valve closed
2/19/2013	2:55:11 PM	SiCl4 post valve closed
2/19/2013	2:55:11 PM	Main Vac valve closed
2/19/2013	2:55:11 PM	Bubbler valve closed
2/19/2013	2:55:11 PM	Bypass valve opened
2/19/2013	2:55:11 PM	Helium MFC set to  0.000000
2/19/2013	2:55:11 PM	H2 MFC set to  0.000000
2/19/2013	2:55:11 PM	BCl3 MFC set to  0.000000
2/19/2013	2:55:11 PM	PH3 MFC set to  0.000000
2/19/2013	2:55:11 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:55:11 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:55:12 PM	Tube furnace set to 0
2/19/2013	2:56:12 PM	Helium valve closed
2/19/2013	2:56:12 PM	H2 valve closed
2/19/2013	2:56:12 PM	BCl3 valve closed
2/19/2013	2:56:12 PM	PH3 valve closed
2/19/2013	2:56:12 PM	SiCl4 pre valve closed
2/19/2013	2:56:12 PM	SiCl4 post valve closed
2/19/2013	2:56:12 PM	Bypass valve closed
2/19/2013	2:56:12 PM	Bubbler valve closed
2/19/2013	2:56:12 PM	Main Vac valve opened
2/19/2013	2:56:12 PM	Helium MFC set to  0.000000
2/19/2013	2:56:12 PM	H2 MFC set to  0.000000
2/19/2013	2:56:12 PM	BCl3 MFC set to  0.000000
2/19/2013	2:56:12 PM	PH3 MFC set to  0.000000
2/19/2013	2:56:12 PM	SiCl4 MFC set to  0.000000
2/19/2013	2:56:12 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	2:56:12 PM	Tube furnace set to 0
2/19/2013	2:56:13 PM	Run finished at 2:56 PM
2/19/2013	2:56:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2013	3:08:02 PM	Recipe started at 3:08 PM
2/19/2013	3:08:02 PM	Helium valve closed
2/19/2013	3:08:02 PM	H2 valve closed
2/19/2013	3:08:02 PM	BCl3 valve closed
2/19/2013	3:08:02 PM	PH3 valve closed
2/19/2013	3:08:02 PM	SiCl4 pre valve closed
2/19/2013	3:08:02 PM	SiCl4 post valve closed
2/19/2013	3:08:02 PM	Bypass valve closed
2/19/2013	3:08:02 PM	Bubbler valve closed
2/19/2013	3:08:02 PM	Main Vac valve opened
2/19/2013	3:08:02 PM	Helium MFC set to  0.000000
2/19/2013	3:08:02 PM	H2 MFC set to  0.000000
2/19/2013	3:08:02 PM	BCl3 MFC set to  0.000000
2/19/2013	3:08:02 PM	PH3 MFC set to  0.000000
2/19/2013	3:08:02 PM	SiCl4 MFC set to  0.000000
2/19/2013	3:08:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	3:08:02 PM	Tube furnace set to 0
2/19/2013	3:38:02 PM	Helium valve closed
2/19/2013	3:38:02 PM	H2 valve closed
2/19/2013	3:38:02 PM	BCl3 valve closed
2/19/2013	3:38:02 PM	PH3 valve closed
2/19/2013	3:38:02 PM	SiCl4 pre valve closed
2/19/2013	3:38:02 PM	SiCl4 post valve closed
2/19/2013	3:38:02 PM	Main Vac valve closed
2/19/2013	3:38:02 PM	Bypass valve closed
2/19/2013	3:38:02 PM	Bubbler valve closed
2/19/2013	3:38:02 PM	Helium MFC set to  0.000000
2/19/2013	3:38:02 PM	H2 MFC set to  0.000000
2/19/2013	3:38:02 PM	BCl3 MFC set to  0.000000
2/19/2013	3:38:02 PM	PH3 MFC set to  0.000000
2/19/2013	3:38:02 PM	SiCl4 MFC set to  0.000000
2/19/2013	3:38:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	3:38:02 PM	Tube furnace set to 0
2/19/2013	3:38:05 PM	Helium valve closed
2/19/2013	3:38:05 PM	BCl3 valve closed
2/19/2013	3:38:05 PM	PH3 valve closed
2/19/2013	3:38:05 PM	SiCl4 pre valve closed
2/19/2013	3:38:05 PM	SiCl4 post valve closed
2/19/2013	3:38:05 PM	Main Vac valve closed
2/19/2013	3:38:05 PM	Bypass valve closed
2/19/2013	3:38:05 PM	Bubbler valve closed
2/19/2013	3:38:05 PM	H2 valve opened
2/19/2013	3:38:05 PM	Helium MFC set to  0.000000
2/19/2013	3:38:05 PM	H2 MFC set to  500.000000
2/19/2013	3:38:05 PM	BCl3 MFC set to  0.000000
2/19/2013	3:38:05 PM	PH3 MFC set to  0.000000
2/19/2013	3:38:05 PM	SiCl4 MFC set to  0.000000
2/19/2013	3:38:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	3:38:06 PM	Tube furnace set to 0
2/19/2013	3:39:18 PM	Helium valve closed
2/19/2013	3:39:18 PM	BCl3 valve closed
2/19/2013	3:39:18 PM	PH3 valve closed
2/19/2013	3:39:18 PM	SiCl4 pre valve closed
2/19/2013	3:39:18 PM	SiCl4 post valve closed
2/19/2013	3:39:18 PM	Main Vac valve closed
2/19/2013	3:39:18 PM	Bypass valve closed
2/19/2013	3:39:18 PM	H2 valve opened
2/19/2013	3:39:18 PM	Bubbler valve opened
2/19/2013	3:39:18 PM	Helium MFC set to  0.000000
2/19/2013	3:39:18 PM	H2 MFC set to  500.000000
2/19/2013	3:39:18 PM	BCl3 MFC set to  0.000000
2/19/2013	3:39:18 PM	PH3 MFC set to  0.000000
2/19/2013	3:39:18 PM	SiCl4 MFC set to  0.000000
2/19/2013	3:39:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	3:39:18 PM	Tube furnace set to 0
2/19/2013	3:39:19 PM	Helium valve closed
2/19/2013	3:39:19 PM	BCl3 valve closed
2/19/2013	3:39:19 PM	PH3 valve closed
2/19/2013	3:39:19 PM	SiCl4 pre valve closed
2/19/2013	3:39:19 PM	SiCl4 post valve closed
2/19/2013	3:39:19 PM	Main Vac valve closed
2/19/2013	3:39:19 PM	Bypass valve closed
2/19/2013	3:39:19 PM	H2 valve opened
2/19/2013	3:39:19 PM	Bubbler valve opened
2/19/2013	3:39:19 PM	Helium MFC set to  0.000000
2/19/2013	3:39:19 PM	H2 MFC set to  500.000000
2/19/2013	3:39:19 PM	BCl3 MFC set to  0.000000
2/19/2013	3:39:19 PM	PH3 MFC set to  0.000000
2/19/2013	3:39:19 PM	SiCl4 MFC set to  0.000000
2/19/2013	3:39:19 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	3:39:20 PM	Tube furnace set to 900
2/19/2013	3:59:20 PM	Helium valve closed
2/19/2013	3:59:20 PM	PH3 valve closed
2/19/2013	3:59:20 PM	SiCl4 pre valve closed
2/19/2013	3:59:20 PM	SiCl4 post valve closed
2/19/2013	3:59:20 PM	Main Vac valve closed
2/19/2013	3:59:20 PM	Bypass valve closed
2/19/2013	3:59:20 PM	H2 valve opened
2/19/2013	3:59:20 PM	BCl3 valve opened
2/19/2013	3:59:20 PM	Bubbler valve opened
2/19/2013	3:59:20 PM	Helium MFC set to  0.000000
2/19/2013	3:59:20 PM	H2 MFC set to  500.000000
2/19/2013	3:59:20 PM	BCl3 MFC set to  20.000000
2/19/2013	3:59:20 PM	PH3 MFC set to  0.000000
2/19/2013	3:59:20 PM	SiCl4 MFC set to  0.000000
2/19/2013	3:59:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	3:59:20 PM	Tube furnace set to 900
2/19/2013	4:59:20 PM	Helium valve closed
2/19/2013	4:59:20 PM	BCl3 valve closed
2/19/2013	4:59:20 PM	PH3 valve closed
2/19/2013	4:59:20 PM	SiCl4 pre valve closed
2/19/2013	4:59:20 PM	SiCl4 post valve closed
2/19/2013	4:59:20 PM	Main Vac valve closed
2/19/2013	4:59:20 PM	Bypass valve closed
2/19/2013	4:59:20 PM	H2 valve opened
2/19/2013	4:59:20 PM	Bubbler valve opened
2/19/2013	4:59:20 PM	Helium MFC set to  0.000000
2/19/2013	4:59:20 PM	H2 MFC set to  500.000000
2/19/2013	4:59:20 PM	BCl3 MFC set to  0.000000
2/19/2013	4:59:20 PM	PH3 MFC set to  0.000000
2/19/2013	4:59:20 PM	SiCl4 MFC set to  0.000000
2/19/2013	4:59:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	4:59:20 PM	Tube furnace set to 750
2/19/2013	5:04:20 PM	H2 valve closed
2/19/2013	5:04:20 PM	BCl3 valve closed
2/19/2013	5:04:20 PM	PH3 valve closed
2/19/2013	5:04:20 PM	SiCl4 pre valve closed
2/19/2013	5:04:20 PM	SiCl4 post valve closed
2/19/2013	5:04:20 PM	Main Vac valve closed
2/19/2013	5:04:20 PM	Bypass valve closed
2/19/2013	5:04:20 PM	Helium valve opened
2/19/2013	5:04:20 PM	Bubbler valve opened
2/19/2013	5:04:20 PM	Helium MFC set to  500.000000
2/19/2013	5:04:20 PM	H2 MFC set to  0.000000
2/19/2013	5:04:20 PM	BCl3 MFC set to  0.000000
2/19/2013	5:04:20 PM	PH3 MFC set to  0.000000
2/19/2013	5:04:20 PM	SiCl4 MFC set to  0.000000
2/19/2013	5:04:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	5:04:20 PM	Tube furnace set to 0
2/19/2013	5:24:20 PM	Helium valve closed
2/19/2013	5:24:20 PM	H2 valve closed
2/19/2013	5:24:20 PM	BCl3 valve closed
2/19/2013	5:24:20 PM	PH3 valve closed
2/19/2013	5:24:20 PM	SiCl4 pre valve closed
2/19/2013	5:24:20 PM	SiCl4 post valve closed
2/19/2013	5:24:20 PM	Main Vac valve closed
2/19/2013	5:24:20 PM	Bypass valve closed
2/19/2013	5:24:20 PM	Bubbler valve closed
2/19/2013	5:24:20 PM	Helium MFC set to  0.000000
2/19/2013	5:24:20 PM	H2 MFC set to  0.000000
2/19/2013	5:24:20 PM	BCl3 MFC set to  0.000000
2/19/2013	5:24:20 PM	PH3 MFC set to  0.000000
2/19/2013	5:24:20 PM	SiCl4 MFC set to  0.000000
2/19/2013	5:24:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	5:24:21 PM	Tube furnace set to 0
2/19/2013	5:24:21 PM	Run finished at 5:24 PM
2/19/2013	5:31:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2013	5:31:09 PM	Recipe started at 5:31 PM
2/19/2013	5:31:09 PM	Helium valve closed
2/19/2013	5:31:09 PM	H2 valve closed
2/19/2013	5:31:09 PM	BCl3 valve closed
2/19/2013	5:31:09 PM	PH3 valve closed
2/19/2013	5:31:09 PM	SiCl4 pre valve closed
2/19/2013	5:31:09 PM	SiCl4 post valve closed
2/19/2013	5:31:09 PM	Main Vac valve closed
2/19/2013	5:31:09 PM	Bubbler valve closed
2/19/2013	5:31:09 PM	Bypass valve opened
2/19/2013	5:31:09 PM	Helium MFC set to  0.000000
2/19/2013	5:31:09 PM	H2 MFC set to  0.000000
2/19/2013	5:31:09 PM	BCl3 MFC set to  0.000000
2/19/2013	5:31:09 PM	PH3 MFC set to  0.000000
2/19/2013	5:31:09 PM	SiCl4 MFC set to  0.000000
2/19/2013	5:31:09 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	5:31:09 PM	Tube furnace set to 0
2/19/2013	5:32:20 PM	Helium valve closed
2/19/2013	5:32:20 PM	H2 valve closed
2/19/2013	5:32:20 PM	BCl3 valve closed
2/19/2013	5:32:20 PM	PH3 valve closed
2/19/2013	5:32:20 PM	SiCl4 pre valve closed
2/19/2013	5:32:20 PM	SiCl4 post valve closed
2/19/2013	5:32:20 PM	Main Vac valve closed
2/19/2013	5:32:20 PM	Bubbler valve closed
2/19/2013	5:32:20 PM	Bypass valve opened
2/19/2013	5:32:20 PM	Helium MFC set to  0.000000
2/19/2013	5:32:20 PM	H2 MFC set to  0.000000
2/19/2013	5:32:20 PM	BCl3 MFC set to  0.000000
2/19/2013	5:32:20 PM	PH3 MFC set to  0.000000
2/19/2013	5:32:20 PM	SiCl4 MFC set to  0.000000
2/19/2013	5:32:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	5:32:20 PM	Tube furnace set to 0
2/19/2013	5:33:20 PM	Helium valve closed
2/19/2013	5:33:20 PM	H2 valve closed
2/19/2013	5:33:20 PM	BCl3 valve closed
2/19/2013	5:33:20 PM	PH3 valve closed
2/19/2013	5:33:20 PM	SiCl4 pre valve closed
2/19/2013	5:33:20 PM	SiCl4 post valve closed
2/19/2013	5:33:20 PM	Bypass valve closed
2/19/2013	5:33:20 PM	Bubbler valve closed
2/19/2013	5:33:20 PM	Main Vac valve opened
2/19/2013	5:33:20 PM	Helium MFC set to  0.000000
2/19/2013	5:33:20 PM	H2 MFC set to  0.000000
2/19/2013	5:33:21 PM	BCl3 MFC set to  0.000000
2/19/2013	5:33:21 PM	PH3 MFC set to  0.000000
2/19/2013	5:33:21 PM	SiCl4 MFC set to  0.000000
2/19/2013	5:33:21 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	5:33:21 PM	Tube furnace set to 0
2/19/2013	5:33:22 PM	Run finished at 5:33 PM
2/19/2013	5:33:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2013	5:44:06 PM	Recipe started at 5:44 PM
2/19/2013	5:44:06 PM	Helium valve closed
2/19/2013	5:44:06 PM	H2 valve closed
2/19/2013	5:44:06 PM	BCl3 valve closed
2/19/2013	5:44:06 PM	PH3 valve closed
2/19/2013	5:44:06 PM	SiCl4 pre valve closed
2/19/2013	5:44:06 PM	SiCl4 post valve closed
2/19/2013	5:44:06 PM	Bypass valve closed
2/19/2013	5:44:06 PM	Bubbler valve closed
2/19/2013	5:44:06 PM	Main Vac valve opened
2/19/2013	5:44:06 PM	Helium MFC set to  0.000000
2/19/2013	5:44:06 PM	H2 MFC set to  0.000000
2/19/2013	5:44:06 PM	BCl3 MFC set to  0.000000
2/19/2013	5:44:06 PM	PH3 MFC set to  0.000000
2/19/2013	5:44:06 PM	SiCl4 MFC set to  0.000000
2/19/2013	5:44:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	5:44:06 PM	Tube furnace set to 0
2/19/2013	6:14:06 PM	Helium valve closed
2/19/2013	6:14:06 PM	H2 valve closed
2/19/2013	6:14:06 PM	BCl3 valve closed
2/19/2013	6:14:06 PM	PH3 valve closed
2/19/2013	6:14:06 PM	SiCl4 pre valve closed
2/19/2013	6:14:06 PM	SiCl4 post valve closed
2/19/2013	6:14:06 PM	Main Vac valve closed
2/19/2013	6:14:06 PM	Bypass valve closed
2/19/2013	6:14:06 PM	Bubbler valve closed
2/19/2013	6:14:06 PM	Helium MFC set to  0.000000
2/19/2013	6:14:06 PM	H2 MFC set to  0.000000
2/19/2013	6:14:06 PM	BCl3 MFC set to  0.000000
2/19/2013	6:14:06 PM	PH3 MFC set to  0.000000
2/19/2013	6:14:06 PM	SiCl4 MFC set to  0.000000
2/19/2013	6:14:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	6:14:06 PM	Tube furnace set to 0
2/19/2013	6:14:09 PM	Helium valve closed
2/19/2013	6:14:09 PM	BCl3 valve closed
2/19/2013	6:14:09 PM	PH3 valve closed
2/19/2013	6:14:09 PM	SiCl4 pre valve closed
2/19/2013	6:14:09 PM	SiCl4 post valve closed
2/19/2013	6:14:09 PM	Main Vac valve closed
2/19/2013	6:14:09 PM	Bypass valve closed
2/19/2013	6:14:09 PM	Bubbler valve closed
2/19/2013	6:14:09 PM	H2 valve opened
2/19/2013	6:14:09 PM	Helium MFC set to  0.000000
2/19/2013	6:14:09 PM	H2 MFC set to  500.000000
2/19/2013	6:14:09 PM	BCl3 MFC set to  0.000000
2/19/2013	6:14:10 PM	PH3 MFC set to  0.000000
2/19/2013	6:14:10 PM	SiCl4 MFC set to  0.000000
2/19/2013	6:14:10 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	6:14:10 PM	Tube furnace set to 0
2/19/2013	6:15:22 PM	Helium valve closed
2/19/2013	6:15:22 PM	BCl3 valve closed
2/19/2013	6:15:22 PM	PH3 valve closed
2/19/2013	6:15:22 PM	SiCl4 pre valve closed
2/19/2013	6:15:22 PM	SiCl4 post valve closed
2/19/2013	6:15:22 PM	Main Vac valve closed
2/19/2013	6:15:22 PM	Bypass valve closed
2/19/2013	6:15:22 PM	H2 valve opened
2/19/2013	6:15:22 PM	Bubbler valve opened
2/19/2013	6:15:22 PM	Helium MFC set to  0.000000
2/19/2013	6:15:22 PM	H2 MFC set to  500.000000
2/19/2013	6:15:22 PM	BCl3 MFC set to  0.000000
2/19/2013	6:15:22 PM	PH3 MFC set to  0.000000
2/19/2013	6:15:22 PM	SiCl4 MFC set to  0.000000
2/19/2013	6:15:22 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	6:15:22 PM	Tube furnace set to 0
2/19/2013	6:15:23 PM	Helium valve closed
2/19/2013	6:15:23 PM	BCl3 valve closed
2/19/2013	6:15:23 PM	PH3 valve closed
2/19/2013	6:15:23 PM	SiCl4 pre valve closed
2/19/2013	6:15:23 PM	SiCl4 post valve closed
2/19/2013	6:15:23 PM	Main Vac valve closed
2/19/2013	6:15:23 PM	Bypass valve closed
2/19/2013	6:15:23 PM	H2 valve opened
2/19/2013	6:15:23 PM	Bubbler valve opened
2/19/2013	6:15:23 PM	Helium MFC set to  0.000000
2/19/2013	6:15:23 PM	H2 MFC set to  500.000000
2/19/2013	6:15:23 PM	BCl3 MFC set to  0.000000
2/19/2013	6:15:23 PM	PH3 MFC set to  0.000000
2/19/2013	6:15:23 PM	SiCl4 MFC set to  0.000000
2/19/2013	6:15:23 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	6:15:23 PM	Tube furnace set to 850
2/19/2013	6:35:23 PM	Helium valve closed
2/19/2013	6:35:23 PM	PH3 valve closed
2/19/2013	6:35:23 PM	SiCl4 pre valve closed
2/19/2013	6:35:23 PM	SiCl4 post valve closed
2/19/2013	6:35:23 PM	Main Vac valve closed
2/19/2013	6:35:23 PM	Bypass valve closed
2/19/2013	6:35:23 PM	H2 valve opened
2/19/2013	6:35:23 PM	BCl3 valve opened
2/19/2013	6:35:23 PM	Bubbler valve opened
2/19/2013	6:35:23 PM	Helium MFC set to  0.000000
2/19/2013	6:35:23 PM	H2 MFC set to  500.000000
2/19/2013	6:35:23 PM	BCl3 MFC set to  20.000000
2/19/2013	6:35:23 PM	PH3 MFC set to  0.000000
2/19/2013	6:35:23 PM	SiCl4 MFC set to  0.000000
2/19/2013	6:35:23 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	6:35:24 PM	Tube furnace set to 900
2/19/2013	7:35:24 PM	Helium valve closed
2/19/2013	7:35:24 PM	BCl3 valve closed
2/19/2013	7:35:24 PM	PH3 valve closed
2/19/2013	7:35:24 PM	SiCl4 pre valve closed
2/19/2013	7:35:24 PM	SiCl4 post valve closed
2/19/2013	7:35:24 PM	Main Vac valve closed
2/19/2013	7:35:24 PM	Bypass valve closed
2/19/2013	7:35:24 PM	H2 valve opened
2/19/2013	7:35:24 PM	Bubbler valve opened
2/19/2013	7:35:24 PM	Helium MFC set to  0.000000
2/19/2013	7:35:24 PM	H2 MFC set to  500.000000
2/19/2013	7:35:24 PM	BCl3 MFC set to  0.000000
2/19/2013	7:35:24 PM	PH3 MFC set to  0.000000
2/19/2013	7:35:24 PM	SiCl4 MFC set to  0.000000
2/19/2013	7:35:24 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	7:35:24 PM	Tube furnace set to 750
2/19/2013	7:40:24 PM	H2 valve closed
2/19/2013	7:40:24 PM	BCl3 valve closed
2/19/2013	7:40:24 PM	PH3 valve closed
2/19/2013	7:40:24 PM	SiCl4 pre valve closed
2/19/2013	7:40:24 PM	SiCl4 post valve closed
2/19/2013	7:40:24 PM	Main Vac valve closed
2/19/2013	7:40:24 PM	Bypass valve closed
2/19/2013	7:40:24 PM	Helium valve opened
2/19/2013	7:40:24 PM	Bubbler valve opened
2/19/2013	7:40:24 PM	Helium MFC set to  500.000000
2/19/2013	7:40:24 PM	H2 MFC set to  0.000000
2/19/2013	7:40:24 PM	BCl3 MFC set to  0.000000
2/19/2013	7:40:24 PM	PH3 MFC set to  0.000000
2/19/2013	7:40:24 PM	SiCl4 MFC set to  0.000000
2/19/2013	7:40:24 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	7:40:24 PM	Tube furnace set to 0
2/19/2013	8:00:24 PM	Helium valve closed
2/19/2013	8:00:24 PM	H2 valve closed
2/19/2013	8:00:24 PM	BCl3 valve closed
2/19/2013	8:00:24 PM	PH3 valve closed
2/19/2013	8:00:24 PM	SiCl4 pre valve closed
2/19/2013	8:00:24 PM	SiCl4 post valve closed
2/19/2013	8:00:24 PM	Main Vac valve closed
2/19/2013	8:00:24 PM	Bypass valve closed
2/19/2013	8:00:24 PM	Bubbler valve closed
2/19/2013	8:00:24 PM	Helium MFC set to  0.000000
2/19/2013	8:00:24 PM	H2 MFC set to  0.000000
2/19/2013	8:00:24 PM	BCl3 MFC set to  0.000000
2/19/2013	8:00:24 PM	PH3 MFC set to  0.000000
2/19/2013	8:00:24 PM	SiCl4 MFC set to  0.000000
2/19/2013	8:00:24 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	8:00:24 PM	Tube furnace set to 0
2/19/2013	8:00:25 PM	Run finished at 8:00 PM
2/19/2013	8:18:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2013	8:18:22 PM	Recipe started at 8:18 PM
2/19/2013	8:18:22 PM	Helium valve closed
2/19/2013	8:18:22 PM	H2 valve closed
2/19/2013	8:18:22 PM	BCl3 valve closed
2/19/2013	8:18:22 PM	PH3 valve closed
2/19/2013	8:18:22 PM	SiCl4 pre valve closed
2/19/2013	8:18:22 PM	SiCl4 post valve closed
2/19/2013	8:18:22 PM	Main Vac valve closed
2/19/2013	8:18:22 PM	Bubbler valve closed
2/19/2013	8:18:22 PM	Bypass valve opened
2/19/2013	8:18:22 PM	Helium MFC set to  0.000000
2/19/2013	8:18:22 PM	H2 MFC set to  0.000000
2/19/2013	8:18:22 PM	BCl3 MFC set to  0.000000
2/19/2013	8:18:22 PM	PH3 MFC set to  0.000000
2/19/2013	8:18:22 PM	SiCl4 MFC set to  0.000000
2/19/2013	8:18:22 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	8:18:22 PM	Tube furnace set to 0
2/19/2013	8:19:18 PM	Helium valve closed
2/19/2013	8:19:18 PM	H2 valve closed
2/19/2013	8:19:18 PM	BCl3 valve closed
2/19/2013	8:19:18 PM	PH3 valve closed
2/19/2013	8:19:18 PM	SiCl4 pre valve closed
2/19/2013	8:19:18 PM	SiCl4 post valve closed
2/19/2013	8:19:18 PM	Main Vac valve closed
2/19/2013	8:19:18 PM	Bubbler valve closed
2/19/2013	8:19:18 PM	Bypass valve opened
2/19/2013	8:19:18 PM	Helium MFC set to  0.000000
2/19/2013	8:19:18 PM	H2 MFC set to  0.000000
2/19/2013	8:19:18 PM	BCl3 MFC set to  0.000000
2/19/2013	8:19:18 PM	PH3 MFC set to  0.000000
2/19/2013	8:19:18 PM	SiCl4 MFC set to  0.000000
2/19/2013	8:19:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	8:19:18 PM	Tube furnace set to 0
2/19/2013	8:20:18 PM	Helium valve closed
2/19/2013	8:20:18 PM	H2 valve closed
2/19/2013	8:20:18 PM	BCl3 valve closed
2/19/2013	8:20:18 PM	PH3 valve closed
2/19/2013	8:20:18 PM	SiCl4 pre valve closed
2/19/2013	8:20:18 PM	SiCl4 post valve closed
2/19/2013	8:20:18 PM	Bypass valve closed
2/19/2013	8:20:18 PM	Bubbler valve closed
2/19/2013	8:20:18 PM	Main Vac valve opened
2/19/2013	8:20:18 PM	Helium MFC set to  0.000000
2/19/2013	8:20:18 PM	H2 MFC set to  0.000000
2/19/2013	8:20:18 PM	BCl3 MFC set to  0.000000
2/19/2013	8:20:18 PM	PH3 MFC set to  0.000000
2/19/2013	8:20:18 PM	SiCl4 MFC set to  0.000000
2/19/2013	8:20:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2013	8:20:18 PM	Tube furnace set to 0
2/19/2013	8:20:19 PM	Run finished at 8:20 PM
2/19/2013	8:20:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
